12" DRAM FAB
Application: Photo FFU
• Chemical filter: e-series cartridge type • FFU size: 4"x4 " • CF quantity: 400 sets total (over three years) • Target AMC: NH3 • Chemical media: ECW-700 (cation ion exchange resin)
Application: Photo FFU
• Chemical filter: e-series cartridge type • FFU size: 4"x4 " • CF quantity: 400 sets total (over three years) • Target AMC: NH3 • Chemical media: ECW-700 (cation ion exchange resin)