12" DRAM FAB
Application: Photo FFU
• Chemical filter: e-series • FFU size: 4"x4 " • CF quantity: >200 sets (over 3 years) • Target AMC: TOC • Chemical media: ECW-500P
相關產品
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12" DRAM FAB
Application: Photo FFU • Chemical filter: e-series • FFU size: 4"x4 " • CF quantity: >100 sets total • Target AMC: TOC, NH3, acid gases • Chemical media: ECW-500P, ECW-700, ECW- 600SN
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SG高壓過濾網(隔板型)
此型高性能濾網具有強勁張力能承受高風速通過,仍能維持其效率2μm DOP 99.97%之濾網,使用於工業大型空壓機等進氣濾清,其構造為玻璃纖維紙三層濾材,並以鋁材隔開濾紙與支持處完全密合接著,外框為鍍鋅鋼板,框的兩側面進風處25mm加凹邊可配合機械的把扣固定。它的前置高壓初級濾網為SH型。 風量: 2000CFM 規格: 24X24X11 1/2 壓損: 0.7" W.G.
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12" DRAM FAB
Application:Facility MAU • Chemical filter: e-series cartridge type • Filter size: 595 mm x 595 mm x 292 mm (D) • MAU quantity: 11 sets • CF quantity: 385 sets • Target AMC: H2S, ozone, NO2 • Chemical media: ECW-600SN
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12" DRAM FAB
Application: Facility MAU • Chemical filter: MP-series, densely packed type • Filter size: 610 mm x 610 mm x 450 mm • CF quantity: 16 sets (two stages) • Target AMC: TOC • Chemical media: ECW-100A
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12" DRAM FAB
Application: Facility PCDA • Airflow, 750 and 1500 m3/hr • Chemical filters: duct and pipe type • PCDA systems: 10-12 sets (over 10 years) • Target AMC: TOC and NH3 • Chemical media: ECW-100A and ECW-400