High Temperature Product Overview Long Fingered Boat Shelf Boat Short Fingered Boat C-Ring Shelf Typical Application Issues：• Slip and backside scratching• Contamination Products Offered： • 200mm Long/Short Fingered Boat and Shelf Boat• 300mm Long/Short Fingered Boat and Shelf Boat OEMs Served： Si Fusion Benefits：• Made from ultrapure silicon with SiFusion’s proprietary ultra pure fusing technology• Optimal tooth angle and proprietary surface finish• Proprietary “No Slip” design Ferrotec Confidential   C-Ring SiC Boat SiFusion LF Boat Tool maintain 1-2 weeks Annually Annually Price Expensive Cheapper than C-Ring boat Cheapper than C-Ring boat Backside scratch No Yes No Slip Yes Yes Less Process Temperature <1100℃ >1100℃ >1100℃   ◆ Comparison of C-Ring, SiC and Silicon boat. ➢Silicon boat can help to fix the problem(Slip/Backside scratch) which come from High Temperature process.➢Silicon boat can help to reduce tool PM loading.  

SEMICONDUCTOR - Materials SEMICONDUCTOR - Materials Quartz Glass -Momentive -Heraeus -Tosoh -Felihua -Qsil    Single Crystal Silicon Single Crystal Silicon Ceramics CVD Silicon Carbide (Distributor) LED / LIGHTNG Quartz CVD Silicon Carbide (Distributor)    SEMICONDUCTOR SEMICONDUCTORAMAT Etch, Thin Film CVD & RTPTokyo Electron EtchLam Research Etch ToolsAxcelisNovellusMattsonOthers    LED / LIGHTNG LED / LIGHTNGVeecoAixtron G3, G4, & G5SOLAR INDUSTRYCentrothermAmtechTempressMRL Industries   

SGA Diamond Disk 產品內容：Our patented technology offers a strong chemical mechanical bonding solution preventing any abrasive pull outs or breakages reducing scratching. We have experience in Cu, W, Oxide, STI, PolySilicon and other related CMP processes and provide optimized specifications depending on the process conditions being used.   Flipper F2X(Double Sided Conditioner) Flipper F2X = Flipper Insert + Flipper Holder 　　　　　　　 ◆ Technical requirements➢Protect one side (Side-B) from slurry while the other side (Side-A) is being used➢Ease of mounting and “flip” over➢Isotropic performance of both sides (Side A and Side B) ◆ Business requirements➢No significant difference for end user, using a single side disk or a Flipper(dual sided)” disk➢Easy to use➢Significantly lower CoO   BACKGRINDING WHEELS 產品內容：Our Fixed Abrasive Vertical Spindle FAVS™ backgrinding wheels are engineered to provide world class quality, consistency and erformance. We provide engineered solutions for grinding of Alumina, Gallium Arsenide, Glass, Germanium, Quartz, Silicon, Sapphire, Silicon Carbide, Silicon Nitride, Lithium Niobate, Zirconia and a wide range of other electronic materials.   1A8 Microgang 產品內容：Our slicing & dicing engineering expertise spans a wide variety of applications including read-write head machining, wafer dicing, chip-scale package singulation, and opto-electronics device slicing.