High Temperature Product Overview
Long Fingered Boat
Shelf Boat
Short Fingered Boat
C-Ring
Shelf
Typical Application Issues：• Slip and backside scratching• Contamination
Products Offered：
• 200mm Long/Short Fingered Boat and Shelf Boat• 300mm Long/Short Fingered Boat and Shelf Boat
OEMs Served：
Si Fusion Benefits：• Made from ultrapure silicon with SiFusion’s proprietary ultra pure fusing technology• Optimal tooth angle and proprietary surface finish• Proprietary “No Slip” design
Ferrotec Confidential
C-Ring
SiC Boat
SiFusion LF Boat
Tool maintain
1-2 weeks
Annually
Annually
Price
Expensive
Cheapper than C-Ring boat
Cheapper than C-Ring boat
Backside scratch
No
Yes
No
Slip
Yes
Yes
Less
Process Temperature
<1100℃
>1100℃
>1100℃
◆ Comparison of C-Ring, SiC and Silicon boat.
➢Silicon boat can help to fix the problem(Slip/Backside scratch) which come from High Temperature process.➢Silicon boat can help to reduce tool PM loading.