主要控制真空元件可以驅動如下元件及廠牌 TMP :可以驅動如下的廠牌 跟型號 Agilent:TMP V-81M, V81T, V84FS, V74FS,V304FS, V704FS,V804FS, V1001 Pfeiffer: Hipace 80, Hipace 300, Hipace 400, Hipace 700 Edwards: Next85 , Next 240, 300, 400 , 此廠牌可顯示TURBO壽命預測&保養時間 Leybold:Turbovac I(X)90,250 可以顯示運轉電流 消耗功率 軸承溫度 顯示轉速 設定轉速 改變轉速 紀錄使用過程 Primary Pump Oil Rotary Vane Pump ( Any Type) Dry Scroll Pump Edwards :Nxds series, for Inverter Motor for Power Saving 可以顯示軸承溫度 紀錄使用時間 顯示轉速 壓力到時自動改變轉速 節省能源 Edwards XDS35i(變頻省電需要真空計導引) Agilent Scroll Pump,:IDP3,7,10,15 Agilent Scroll Inverte:300,600 Gauges Agilent: FRG720 full range , hot filament and Pirani, 1atm to -10 range FRG700/702 full range gauge, inverted magnetron and Pirani, with wide measurement range from 5 x 10-9 mbar to atmosphere Edwards: WRG full range gauge, inverted magnetron and Pirani, with wide measurement range from 5 x 10-9 mbar to atmosphere AIM inverted magnetron and Pirani, with wide measurement range from 5 x 10-9 mbar to atmosphere APG-100 , Pirani 1 ATM ~-4 Torr Inficon: BPG-400 ull range , hot filament and Pirani, 1atm to -10 range MPG-400 Psg 500 Granville Phillips: 354 , 5E-2~-10 range 356, 1 atm ~-10 range 275 , 1 atm ~-4 range Valves& Power ( For PCB/Cooling Fan,,,,,) Logistics control