自動控制真空系統模組
主要控制真空元件可以驅動如下元件及廠牌
TMP :可以驅動如下的廠牌 跟型號
Agilent：TMP V-81M, V81T, V84FS, V74FS,V304FS, V704FS,V804FS, V1001
Pfeiffer： Hipace 80, Hipace 300, Hipace 400, Hipace 700
Edwards： Next85 , Next 240, 300, 400 , 此廠牌可顯示TURBO壽命預測&保養時間
Leybold：Turbovac I(X)90,250
可以顯示運轉電流 消耗功率 軸承溫度 顯示轉速 設定轉速 改變轉速 紀錄使用過程
Primary Pump
Oil Rotary Vane Pump ( Any Type)
Dry Scroll Pump
Edwards ：Nxds series, for Inverter Motor for Power Saving
可以顯示軸承溫度 紀錄使用時間 顯示轉速 壓力到時自動改變轉速 節省能源
Edwards XDS35i(變頻省電需要真空計導引)
Agilent Scroll Pump,：IDP3,7,10,15
Agilent Scroll Inverte：300,600
Gauges
Agilent：
FRG720 full range , hot filament and Pirani, 1atm to -10 range
FRG700/702 full range gauge, inverted magnetron and Pirani, with wide measurement range from 5 x 10-9 mbar to atmosphere
Edwards：
WRG full range gauge, inverted magnetron and Pirani, with wide measurement range from 5 x 10-9 mbar to atmosphere
AIM inverted magnetron and Pirani, with wide measurement range from 5 x 10-9 mbar to atmosphere
APG-100 , Pirani 1 ATM ~-4 Torr
Inficon：
BPG-400 ull range , hot filament and Pirani, 1atm to -10 range
MPG-400
Psg 500
Granville Phillips：
354 , 5E-2~-10 range
356, 1 atm ~-10 range
275 , 1 atm ~-4 range
Valves& Power ( For PCB/Cooling Fan,,,,,) Logistics control
