12" DRAM FAB
Application:Facility MAU • Chemical filter: e-series cartridge type • Filter size: 595 mm x 595 mm x 292 mm (D) • MAU quantity: 11 sets • CF quantity: 385 sets • Target AMC: H2S, ozone, NO2 • Chemical media: ECW-600SN
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12" DRAM FAB
Application: Facility MAU • Chemical filter: MP-series, densely packed type • Filter size: 610 mm x 610 mm x 450 mm • CF quantity: 16 sets (two stages) • Target AMC: TOC • Chemical media: ECW-100A
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12" DRAM FAB
Application: Facility PCDA • Airflow, 750 and 1500 m3/hr • Chemical filters: duct and pipe type • PCDA systems: 10-12 sets (over 10 years) • Target AMC: TOC and NH3 • Chemical media: ECW-100A and ECW-400
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G8.5 TFT LCD
Application: Photo CCU • Chemical filters: e-series • CCU : Chemical Clean Unit • quantity: 20 sets • Target AMC: TOC and NH3 • Chemical media: ECW-500P and • ECW-700
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E-Series Cartridge Type
產品名稱: Chemical Filters(化學過濾器) 外框尺寸: 可客製化製做 應用於: MAU,FFU,RAU 裝在空調箱(廠務部門) V-bank ABS frame 外框材質: 聚苯乙烯 V-bank metal frame 外框材質: 金屬 有二種設計款
